Researchers from China describe the fabrication of large-area photonic crystals with strong photonic bandgaps in the visible region. The researchers fabricated the photonic crystals (PCs) by ...

In dry etching, the trajectory of accelerated ions is non-uniform and non-vertical, due to collisions with gas molecules and other random thermal effects (figure 1). This has an impact on etch results ...

In this technique, fluorine-based plasma chemistry is used for silicon etching, which is combined with a fluorocarbon plasma process to offer sidewall passivation and enhanced selectivity to masking ...