SAN JOSE — KLA-Tencor Corp. next month will begin shipping a new version of its lithography simulation software line that includes an etch modeling capability. The new Prolith version 7.2 software ...

LEUVEN, Belgium — This week, at SPIE 2023 Advanced Lithography + Patterning Conference, in San Jose, CA, imec, a world-leading research and innovation hub in nanoelectronics and digital technologies, ...

Over the past few decades, polydimethylsiloxane (PDMS) has become the material of choice for a variety of microsystem applications, including microfluidics, imprint lithography, and soft microrobotics ...

E-beam lithography operates on principles similar to photolithography but provides significantly higher resolution. The process begins with coating a substrate with an electron-sensitive resist ...

New research paper entitled “Plasma-based area selective deposition for extreme ultraviolet resist defectivity reduction and process window improvement” from TEL Technology Center, Americas and IBM ...

The manufacture of semiconductors has attracted a lot of interest of late, especially because the U.S. produces such a small global share of the most advanced chips. Dutch company ASML’s standout ...

Self-aligned lithographic process techniques are playing an increasingly important role in advanced technology nodes. Even with the growing use of extreme ultraviolet (EUV) lithography, ...

A team of scientists from research center ICFO and photonics materials manufacturer Corning has developed a new method for fabricating anti-reflective (AR) surfaces – achieved through nano-structured ...

Major processes in semiconductor wafer fabrication: 1) wafer preparation, 2) pattern transfer, 3) doping, 4) deposition, 5) etching, and 6) packaging. The process of creating semiconductors can be ...

JSR Micro, a Japanese chemical and materials company, supplies chip makers with products used in lithography and patterning during the fabrication process. Semiconductor supplier JSR Micro Inc. is ...