LEUVEN, Belgium — This week, at SPIE 2023 Advanced Lithography + Patterning Conference, in San Jose, CA, imec, a world-leading research and innovation hub in nanoelectronics and digital technologies, ...

The manufacture of semiconductors has attracted a lot of interest of late, especially because the U.S. produces such a small global share of the most advanced chips. Dutch company ASML’s standout ...

New research paper entitled “Plasma-based area selective deposition for extreme ultraviolet resist defectivity reduction and process window improvement” from TEL Technology Center, Americas and IBM ...

Major processes in semiconductor wafer fabrication: 1) wafer preparation, 2) pattern transfer, 3) doping, 4) deposition, 5) etching, and 6) packaging. The process of creating semiconductors can be ...

E-beam lithography operates on principles similar to photolithography but provides significantly higher resolution. The process begins with coating a substrate with an electron-sensitive resist ...

Self-aligned lithographic process techniques are playing an increasingly important role in advanced technology nodes. Even with the growing use of extreme ultraviolet (EUV) lithography, ...

With photolithography not able to produce circuit lines much thinner than 100nm, a major focus of research into nanotechnology is in developing means to construct circuits that break the 100nm barrier ...

A team of scientists from research center ICFO and photonics materials manufacturer Corning has developed a new method for fabricating anti-reflective (AR) surfaces – achieved through nano-structured ...

Etching is a way of removing a material through either chemical or physical means. There are many ways etching of the surface a material can be performed, but in the world of nanoscale etching, ...

The spin-on carbon market is set for robust growth as semiconductor manufacturers expand advanced lithography and etching processes to improve device performance, yield, and integration density across ...