Abstract: This paper reports a novel HBr-based, high-selectivity, non-Bosch deep silicon etching process capable of producing smooth etched surfaces while maintaining comparable selectivity and ...

ANODIC photocurrents are often produced when polarized metallic electrodes covered with oxide or other semiconducting material are illuminated in solutions 1. The primary process is here the ...

Abstract: Achieving robust hermetic sealing for low-cost, miniaturized MEMS pressure sensors without compromising device performance remains a significant challenge. This paper introduces a novel, low ...

To explain the characteristic avoidance of etching on an electropolishing anode, Hoar and Mowat 1,2 postulated the formation upon it of a compact solid film, dissolving at its outer surface as fast as ...

Stocks: Real-time U.S. stock quotes reflect trades reported through Nasdaq only; comprehensive quotes and volume reflect trading in all markets and are delayed at ...