Abstract: The continuous miniaturization of semiconductor patterns improves performance but also leads to frequent pattern disruptions that significantly reduce manufacturing yields. In the field, ...

[The Signal Path] shows us how to recreate a classic science experiment to measure the weight of an electron. Things are easier for us, because unlike [J. J. Thomson] in 1897, we have ready sources of ...

Abstract: Path following control of micrometer-sized tools is the key to improve automation capabilities at the small scales. This paper addresses the issue of path following control for piezoelectric ...