Abstract: In this work, we report a high performance MEMS electrometer based on a clamped-free semi-circular beams (CFCB) resonator with a new sensing scheme of vibration perturbation. The CFCB ...

Abstract: Silicon photonic micro-ring resonators (MRR) developed on the silicon-on-insulator (SOI) platform, owing to their high sensitivity and small footprint, show great potential for many chemical ...