Abstract: This paper reports a novel DRIE compensation mask pattern for fabricating an extremely thick sense-comb structure. When we attempted to fabricate a 300-μm-thick sense-comb structure to ...

A technical paper titled “Make the impossible possible: use variable-shaped beam mask writers and curvilinear full-chip inverse lithography technology for 193i contacts/vias with mask-wafer ...

Abstract: This work presents a novel procedure to address the synthesis of metalens antennas with tight requirements in near-field complex scenarios. A model to compute the near field is introduced ...

The FBI’s release of new surveillance images and footage of a subject believed to be connected to Nancy Guthrie’s apparent abduction could open up a trove of information investigators can use to ...