Imaging spectroscopic ellipsometry delivers nanometer-level sensitivity and spatial resolution, addressing the limitations of conventional metrology techniques.

Get article recommendations from ACS based on references in your Mendeley library. Pair your accounts. Export articles to Mendeley Get article recommendations from ACS based on references in your ...

Abstract: Machine learning (ML) techniques are popular in many parameter estimation tasks; however, they face challenges in the real-world deployment due to the lack of robustness to errors. ML ...